WebMay 2, 2024 · KLA-TENCOR CORPORATION (Milpitas, CA, US) International Classes: G06T7/00; G06T5/00. View Patent Images: Download PDF 11295432 . US Patent References: 20160289669: DEVICES AND SYSTEMS FOR MOLECULAR BARCODING OF NUCLEIC ACID TARGETS IN SINGLE CELLS: 2016-10-06: Fan: 9262821: Inspection recipe setup from … WebNon-Patterned Surface Defect Inspection: • KLA-Tencor SP1-xxx Parts. • KLA-Tencor SurfScan Parts. Patterned Ultra-Violet (UV) Film Thickness Measurement: • KLA-Tencor UV1xx0 Parts. • KLA-Tencor F5 (x) & SFx Parts. KLA-Tencor Surface Profiler Parts. KLA-Tencor 8xxx CD-SEM System Parts. KLA-Tencor Vacuum System Parts.
(PDF) High Power Laser-Sustained Plasma Light Sources for KLA …
WebK-T Services includes comprehensive contracts, time and materials, spares, asset management, customer training, and yield consulting. WAFER LEVEL METROLOGY KLA … WebManufacturer: KLA-Tencor The KLA-Tencor AIT XP+ Patterned Wafer Inspection system is designed to meet the needs of 0.13um and beyond design rule processes. Based on the highly popular AIT series, the AIT XP+ incorporates Mixed Mode Detec... San Jose, CA, USA Click to Request Price KLA-Tencor AIT XP+ used Manufacturer: KLA-Tencor Model: AIT XP swap it pocket thirty-one
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WebApr 8, 2024 · Since the Cu layer could be affected by the RIE process, we measured changes in resistance and thickness of the Cu layer using the four-point probe (CMT-SR 2000 N, AIT, Suwon, Korea) and stylus-based surface profiler (Alpha-Step IQ, KLA Tencor, Milpitas, CA, USA), respectively. WebDec 14, 2024 · What is claimed: 1. A metrology system comprising: a light source; and a spectrometer, wherein the light source comprises: a gas containment structure; a plasma ignition device; a pump laser configured to generate a pump beam including illumination of a wavelength proximate to a weak absorption line of a neutral gas contained in the gas … WebKLA-Tencor Particle Measurement Systems for Non-Pattern or Patter Wafers: Non-pattern Units: Surfscan 4000, 5000, 6xxx, SP1, SP2 and SP1 TBI Series Pattern Units: Surfscan … skipwith station